T. Hesjedal et al., SCANNING ACOUSTIC TUNNELING MICROSCOPY AND SPECTROSCOPY - A PROBING TOOL FOR ACOUSTIC SURFACE OSCILLATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1569-1572
A method is presented for the universal probing of surface acoustic wa
ves (SAWs). For measuring high frequency SAWs by scanning tunneling mi
croscopy (STM) a stroboscopic snapshot technique was employed, named s
canning acoustic tunneling microscopy. The amplitude and the phase of
a state of oscillation within a SAW field are a superposition of the s
urface topography and the oscillation trajectory. Measuring with atomi
c resolution the observed contrast can be understood by a spherical tu
nneling model. A STM based system is proposed that reaches submicron r
esolution for the quantitative evaluation of elastic constants. With t
his system the velocity dispersion is obtained from the detection of l
aser generated SAW pulses by a broadband STM. Scanning acoustic tunnel
ing spectroscopy using different acoustic modes opens a door for quant
itative studies of nanoscale structures. (C) 1997 American Vacuum Soci
ety. [S0734-211X(97)10004-X].