ATOMIC-FORCE MICROSCOPE-BASED DATA-STORAGE USING REPLICATED MEDIA

Authors
TERRIS BD RISHTON SA MAMIN HJ BEST ME LOGAN JA RUGAR D
Citation
Bd. Terris et al., ATOMIC-FORCE MICROSCOPE-BASED DATA-STORAGE USING REPLICATED MEDIA, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1584-1587
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
15
Issue
4
Year of publication
1997
Pages
1584 - 1587
Database
ISI
SICI code
1071-1023(1997)15:4<1584:AMDURM>2.0.ZU;2-E
Abstract
We have developed a technique for both mastering and replicating data patterns for potential use in an atomic force microscope (AFM)-based d ata storage device. The process consists of using electron beam lithog raphy to write data features as small as 50 nm and a photopolymerizati on process to faithfully replicate the written marks. The replicas can be read using a contact-mode AFM tip on a rotating disk, and no chang e in the signal is seen after 12 days of continuous reading. (C) 1997 American Vacuum Society. [S0734-211X(97)10504-23].