Aa. Ejov et al., EX-SITU SCANNING-TUNNELING-MICROSCOPY INVESTIGATIONS OF THE MODIFICATION OF TITANIUM SURFACE DUE TO CORROSION PROCESSES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1547-1550
Scanning tunneling microscopy was implemented for the comparative surf
ace investigation of mechanically polished and electrochemically treat
ed titanium samples. The titanium exposed to the phosphate buffered sa
line solution reveal the increased topography roughness (5-15 nm) of o
xide thin layer on its surface. The introduction of H2O2 into the solu
tion leads to the enhanced dissolution of the titanium oxide film resu
lting in a more defective surface. The I(V) dependencies obtained from
spectroscopic measurements are indicative of the semiconducting prope
rties of the thin oxide layer.