PIEZOELECTRIC SLIDING PUSHING MICROPOSITIONER IN A SCANNING TUNNELINGMICROSCOPE

Authors
YAO XW XU L ZHANG LP HU J GE GQ GONG PR XU YL LU SL LI MQ
Citation
Xw. Yao et al., PIEZOELECTRIC SLIDING PUSHING MICROPOSITIONER IN A SCANNING TUNNELINGMICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1646-1647
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
3
Year of publication
1994
Pages
1646 - 1647
Database
ISI
SICI code
1071-1023(1994)12:3<1646:PSPMIA>2.0.ZU;2-P
Abstract
A piezoelectric micropositioner for coarse sample translation in a sca nning tunneling microscope (STM) has been designed. The mechanical con struction for the positioner is very simple, and it can be separated f rom the sample carriage during STM imaging. The coarse sample movement is obtained via a sliding-pushing mechanism, and a displacement speed of 0.1 mm/s has been attained. The performance of the STM is tested b y imaging a highly oriented pyrolytic graphite sample.