R. Luthi et al., PROGRESS IN NONCONTRACT DYNAMIC FORCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1673-1676
The technique of operating the scanning force microscope in the dynami
c noncontact mode (dynamic force microscopy) has been improved. Home-b
uilt instruments based on an optical beam deflection scheme in two dif
ferent environments were used. The two force microscopes were operated
in ambient air and in ultrahigh vacuum, respectively. In order to con
trol the oscillating cantilever different methods were applied: slope-
detection (lock-in amplifier, RMS-to-DC converter) and frequency modul
ation (FM) technique as well. The advantages of this nondestructive te
chnique are demonstrated on different samples, such as soft organic ma
tter (hexagonally packed intermediate layer, Langmuir-Blodgett film),
layer-structured compounds (CdI2), n-doped Si(111), and ferroelectric
crystals [triglycine sulfate (TGS), guanidinium aluminum sulfate hexah
ydrate (GASH)]. On TGS and GASH cleavage faces, the ferroelectric doma
ins and domain walls could be imaged. From experimental data a spatial
resolution of about 1-2 nm in lateral and <0.1 nm in vertical directi
ons could be determined.