FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE

Citation
N. Liu et al., FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1712-1715
Citations number
16
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
12
Issue
3
Year of publication
1994
Pages
1712 - 1715
Database
ISI
SICI code
1071-1023(1994)12:3<1712:FODTBT>2.0.ZU;2-0
Abstract
Scanning tunneling electron microscopy (STM) has recently shown great promise for surface modification in the nanometer regime. As is well k nown, the normal STM tips are easily damaged by mechanical contact wit h the sample surface in most cases. In this paper we describe a new ty pe of diamond STM tip prepared by the microwave plasma chemical vapor deposition technique. The reactant is a gas mixture of methane and hyd rogen. Diamond crystals are grown on a tungsten tip. The diamond tips are very hard and always have enough electrical conductivity for STM e xperiments. They can be used as a machining tool to scratch the metal surfaces.