N. Liu et al., FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1712-1715
Scanning tunneling electron microscopy (STM) has recently shown great
promise for surface modification in the nanometer regime. As is well k
nown, the normal STM tips are easily damaged by mechanical contact wit
h the sample surface in most cases. In this paper we describe a new ty
pe of diamond STM tip prepared by the microwave plasma chemical vapor
deposition technique. The reactant is a gas mixture of methane and hyd
rogen. Diamond crystals are grown on a tungsten tip. The diamond tips
are very hard and always have enough electrical conductivity for STM e
xperiments. They can be used as a machining tool to scratch the metal
surfaces.