CROSS-SECTION X-SCANNING FORCE MICROSCOPY ANALYSIS OF DIFFERENT HARD COATINGS AND THIN-FILMS

In the study of thin films and hard coatings the cross-sectional struc tural information is of vital importance in order to understand and co ntrol the desired properties of the coating substrate systems. This in formation has been so far obtained using scanning electron microscopy or cross-section transmission electron microscopy (X-TEM). We have dev eloped a sample preparation technique allowing us to use cross-section scanning force microscopy for cross-section studies. Results from thi n hard coatings and from thin films on silicon wafers are presented, r esults obtained are compared with X-TEM analysis, and the prospects an d limitations of the method are discussed.