Re. Scholten et al., NANOSTRUCTURE FABRICATION VIA DIRECT WRITING WITH ATOMS FOCUSED IN LASER FIELDS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1847-1850
The techniques of atom optics can be applied during the deposition of
atoms onto a surface to produce nanostructures. A laser is used to for
m a standing wave intensity pattern in front of the substrate. An atom
beam, which has been collimated by optical means, is focused onto the
substrate by dipole forces from the standing wave pattern so as to de
posit a series of lines spaced by half the laser wavelength. We descri
be the fabrication of a Cr nanograting formed using this new technique
. The experimental arrangement for deposition and the optical collimat
ion of the atom beam are described. Scanning electron microscopy (SEM)
and atomic force microscopy (AFM)images of the resulting nanostructur
es are presented.