N. Liu et al., DIAMOND-COATED TIPS AND THEIR APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1856-1859
Scanning tunneling microscope (STM) has recently demonstrated its pote
ntial application as a powerful tool for nanometer-scale surface modif
ication. We have successfully fabricated new types of diamond-coated S
TM tips by using microwave plasma chemical vapor deposition (MPCVD). T
he reactant is a gaseous mixture of methane and hydrogen, sometimes ad
ding oxygen. While natural diamond is a good insulator, the electrical
conductivity of diamond-coated tips made by MPCVD technique is always
high enough for STM experiments. These tips are quite stable, hard en
ough to make machining on metal or other solid surfaces in nanometer s
cale. We have applied the diamond coated STM tip to so-called controll
ed machining on the metallic surfaces, such as gold, silver, and plati
num films, and even polycrystal platinum, single crystal nickel, and p
alladium. Further investigations, including the results caused by diff
erent tips, applications for nanometer-scale processing and engineerin
g, etc., have been discussed. This technique might become a potential
useful tool for nanometer science and technology in the future.