TUNNELING THROUGH AN EPITAXIAL OXIDE FILM - AL2O3 ON NIAL(110)

Citation
T. Bertrams et al., TUNNELING THROUGH AN EPITAXIAL OXIDE FILM - AL2O3 ON NIAL(110), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 2122-2124
Citations number
4
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
12
Issue
3
Year of publication
1994
Pages
2122 - 2124
Database
ISI
SICI code
1071-1023(1994)12:3<2122:TTAEOF>2.0.ZU;2-B
Abstract
By controlled oxidation of a clean NiAl(110) surface an epitaxial thin layer of Al2O3 may be grown. The oxide layer shows a sharp low-energy electron diffraction pattern of two domains of nearly rectangular uni t cells. A stable tunneling current was obtained for a wide range of s ample bias voltages U (from a few mV up to nearly 10 V). For U in the mV range the images essentially contain contributions of the interface layer, which can be measured with atomic resolution. For large U (e.g ., 4 V) the electronic states of the oxide film contributed additional ly to the substrate electrons, which allows an accurate analysis of th e growth mode of the oxide film.