THEORY OF THE CROSS-SECTIONS FOR INELASTIC-SCATTERING OF ELECTRONS BYCORE-LEVEL EXCITATIONS IN SOLIDS

A calculation of cross sections for the inelastic scattering of electr ons from core levels is carried out based on a model in which core lev el electrons are excited into a free-electron-like band state. A simpl ified model is also developed that assumes oscillator strengths approp riate to band-to-band excitations in solids. The results for Al L-23 a nd Mo M-45 cross sections are compared with a number of previous calcu lations. These previous calculations include. (a) the constant-oscilla tor-strength model, (b) the Rez model (based on excitations to atomic- like states), and (c) the semi-empirical hydrogenic model proposed by Egerton. We have incorporated optical data into all of the models cons idered in this paper with the exception of Egerton's. Calculations are presented for incident electron energies of 100, 200 and 500 keV, col lection angles of 1-41 mrad, and energy collection windows of 20-200 e V. Comparison is also made with experiment where possible and reasonab le agreement is found.