The segregation of impurities at grain boundaries is a well known phen
omenon in materials science. In some cases the grain boundary segregat
ion causes embrittlement of the material. The effect depends on the am
ount of impurity coverage of the grain boundaries. A suitable techniqu
e for the quantification of the grain boundary segregation of impuriti
es is energy dispersive X-ray spectroscopy in a dedicated scanning tra
nsmission electron microscope. We have investigated a model system, th
e segregation of bismuth at grain boundaries in copper, and have found
inconsistent quantitative results from the energy dispersive X-ray sp
ectroscopy measurements under different experimental conditions. The i
nconsistencies were caused by beam broadening in the specimen which de
pends on the specimen thickness, A new method is proposed to quantify
impurity segregation. An effective scanwidth is calculated for the sca
nning transmission electron microscope, depending on specimen thicknes
s, as determined by electron energy loss spectroscopy. This approach t
akes beam broadening into account. The application to different grain
boundaries in Cu doped with Bi yields quantitative results which are i
ndependent of experimental conditions.