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Results: 76-100/1594
Authors:
SMITH BK
SNIEGOWSKI JJ
LAVIGNE G
BROWN C
Citation: Bk. Smith et al., THIN TEFLON-LIKE FILMS FOR ELIMINATING ADHESION IN RELEASED POLYSILICON MICRO STRUCTURE, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 159-163
Authors:
TAKAGI H
MAEDA R
CHUNG TR
SUGA T
Citation: H. Takagi et al., LOW-TEMPERATURE DIRECT BONDING OF SILICON AND SILICON DIOXIDE BY THE SURFACE ACTIVATION METHOD, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 164-170
Authors:
TAS N
WISSINK J
SANDER L
LAMMERINK T
ELWENSPOEK M
Citation: N. Tas et al., MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 171-178
Authors:
WEICHEL S
DEREUS R
LINDAHL M
Citation: S. Weichel et al., SILICON-TO-SILICON WAFER BONDING USING EVAPORATED GLASS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 179-184
Authors:
YANG E
FUJITA H
Citation: E. Yang et H. Fujita, DETERMINATION OF THE MODIFICATION OF YOUNGS MODULUS DUE TO JOULE HEATING OF POLYSILICON MICROSTRUCTURES USING U-SHAPED BEAMS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 185-190
Authors:
BRUGGER J
BELJAKOVIC G
DESPONT M
BIEBUYCK H
DEROOIJ NF
VETTIGER P
Citation: J. Brugger et al., LOW-CAST PDMS SEAL RING FOR SINGLE-SIDE WET ETCHING OF MEMS STRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 191-194
Authors:
KIANG MH
SOLGAARD O
LAU KY
MULLER RS
Citation: Mh. Kiang et al., POLYSILICON OPTICAL MICROSCANNERS FOR LASER-SCANNING DISPLAYS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 195-199
Authors:
ASTIE S
GUE AM
SCHEID E
LESCOUZERES L
CASSAGNES A
Citation: S. Astie et al., OPTIMIZATION OF AN INTEGRATED SNO2 GAS SENSOR USING A FEM SIMULATOR, Sensors and actuators. A, Physical, 69(3), 1998, pp. 205-211
Authors:
VANGBO M
Citation: M. Vangbo, AN ANALYTICAL ANALYSIS OF A COMPRESSED BISTABLE BUCKLED BEAM, Sensors and actuators. A, Physical, 69(3), 1998, pp. 212-216
Authors:
HARONIAN D
Citation: D. Haronian, INPLANE DEGREE-OF-FREEDOM OPTICAL WAVE-GUIDE DISPLACEMENT SENSORS BASED ON GEOMETRICAL MODULATION, Sensors and actuators. A, Physical, 69(3), 1998, pp. 217-225
Authors:
KAPLAN BZ
SUISSA U
Citation: Bz. Kaplan et U. Suissa, EXPERIMENTAL PROOF THAT FLUXGATES OPERATION IS DIRECTLY RELATED TO ELECTRIC ANTENNAS THEORY, Sensors and actuators. A, Physical, 69(3), 1998, pp. 226-233
Authors:
KUGEL VD
XU BM
ZHANG QM
CROSS LE
Citation: Vd. Kugel et al., BIMORPH-BASED PIEZOELECTRIC AIR ACOUSTIC TRANSDUCER - MODEL, Sensors and actuators. A, Physical, 69(3), 1998, pp. 234-242
Authors:
ROY S
IZAD A
DEANNA RG
MEHREGANY M
Citation: S. Roy et al., SMART ICE DETECTION SYSTEMS BASED ON RESONANT PIEZOELECTRIC TRANSDUCERS, Sensors and actuators. A, Physical, 69(3), 1998, pp. 243-250
Authors:
CHAHOUD M
WEHMANN HH
SCHLACHETZKI A
Citation: M. Chahoud et al., ETCHING SIMULATION OF CONVEX AND MIXED INP AND SI STRUCTURES, Sensors and actuators. A, Physical, 69(3), 1998, pp. 251-258
Authors:
JUNG I
ROH Y
Citation: I. Jung et Y. Roh, DESIGN AND FABRICATION OF PIEZOCERAMIC BIMORPH VIBRATION SENSORS, Sensors and actuators. A, Physical, 69(3), 1998, pp. 259-266
Authors:
PEDERSEN M
OLTHUIS W
BERGVELD P
Citation: M. Pedersen et al., AN INTEGRATED SILICON CAPACITIVE MICROPHONE WITH FREQUENCY-MODULATED DIGITAL OUTPUT, Sensors and actuators. A, Physical, 69(3), 1998, pp. 267-275
Authors:
BERQUEZ L
FRANCESCHI JL
Citation: L. Berquez et Jl. Franceschi, MODELING AND CHARACTERIZATION OF TRANSDUCERS FOR THERMOACOUSTIC SIGNAL, Sensors and actuators. A, Physical, 69(2), 1998, pp. 115-120
Authors:
ZHANG HX
ZHAO YJ
YANG SZ
LI HJ
Citation: Hx. Zhang et al., A NOVEL CO-BASED AMORPHOUS MAGNETIC-FIELD SENSOR, Sensors and actuators. A, Physical, 69(2), 1998, pp. 121-125
Authors:
VANDEREERDEN FJM
DEBREE HE
TIJDEMAN H
Citation: Fjm. Vandereerden et al., EXPERIMENTS WITH A NEW ACOUSTIC PARTICLE-VELOCITY SENSOR IN AN IMPEDANCE TUBE, Sensors and actuators. A, Physical, 69(2), 1998, pp. 126-133
Authors:
WANG TY
ZHENG SX
YANG ZG
Citation: Ty. Wang et al., A HIGH-PRECISION DISPLACEMENT SENSOR USING A LOW-FINESSE FIBEROPTIC FABRY-PEROT-INTERFEROMETER, Sensors and actuators. A, Physical, 69(2), 1998, pp. 134-138
Authors:
HIETANEN J
Citation: J. Hietanen, CLOSED-FORM FORMULATION FOR SENSITIVITY OF CAPACITIVE ULTRASONIC TRANSDUCERS USING V-GROOVED BACKPLATES, Sensors and actuators. A, Physical, 69(2), 1998, pp. 139-142
Authors:
LIU G
CHUANG SL
Citation: G. Liu et Sl. Chuang, POLARIMETRIC OPTICAL-FIBER WEIGHT SENSOR, Sensors and actuators. A, Physical, 69(2), 1998, pp. 143-147
Authors:
TIAN GY
ZHAO ZX
BAINES RW
Citation: Gy. Tian et al., THE RESEARCH OF INHOMOGENEITY IN EDDY-CURRENT SENSORS, Sensors and actuators. A, Physical, 69(2), 1998, pp. 148-151
Authors:
ISMAIL ABM
SHIDA K
Citation: Abm. Ismail et K. Shida, NONCONTACT MULTI-SENSING TECHNIQUE FOR THE PRECISE MEASUREMENT OF CONCENTRATION OF ELECTROLYTIC SOLUTION, Sensors and actuators. A, Physical, 69(2), 1998, pp. 152-155
Authors:
CHEN Y
CHAN HLW
HUI NM
WONG YW
CHOY CI
Citation: Y. Chen et al., RESPONSE OF NANOCOMPOSITE PYROELECTRIC DETECTORS, Sensors and actuators. A, Physical, 69(2), 1998, pp. 156-165