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Authors: KOZICKI MN ALLGAIR J JENKINSGRAY A FERRY DK WHIDDEN TK

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Citation: J. Allgair et al., FORMATION OF NANOSCALE COBALT SILICIDE AND GOLD WIRES USING ELECTRON-BEAM AND CHEMICALLY ENHANCED VAPOR ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1855-1859

Authors: WHIDDEN TK ALLGAIR J JENKINSGRAY A KHOURY M KOZICKI MN FERRY DK

Citation: Tk. Whidden et al., NANOSCALE LITHOGRAPHY WITH ELECTRON EXPOSURE OF SIO2 RESISTS, JPN J A P 1, 34(8B), 1995, pp. 4420-4425

Authors: WHIDDEN TK ALLGAIR J JENKINSGRAY A KOZICKI MN

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Authors: WHIDDEN TK ALLGAIR J RYAN JM KOZICKI MN FERRY DK

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