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Authors: ISHII A AMADATSU S MINOMO S TANIGUCHI M SUGIYO M

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Authors: ISHII A AMADATSU S MINOMO S TANIGUCHI M SUGIYO M SAKAGUCHI Y KOBAYASHI T

Citation: A. Ishii et al., SUPER-WIDE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE EXCITED BY TRAVELING MICROWAVE AS AN EFFICIENT TOOL FOR DIAMOND-LIKE CARBON-FILM DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1241-1243