Authors:
Serre, C
Romano-Rodriguez, A
Perez-Rodriguez, A
Morante, JR
Fonseca, L
Acero, MC
Kogler, R
Skorupa, W
Citation: C. Serre et al., beta-SiC on SiO2 formed by ion implantation and bonding for micromechanicsapplications, SENS ACTU-A, 74(1-3), 1999, pp. 169-173