Authors:
Chang, HY
Adomaitis, RA
Kidder, JN
Rubloff, GW
Citation: Hy. Chang et al., Influence of gas composition on wafer temperature in a tungsten chemical vapor deposition reactor: Experimental measurements, model development, and parameter identification, J VAC SCI B, 19(1), 2001, pp. 230-238
Citation: Ra. Adomaitis, Spectral filtering for improved performance of collocation discretization methods, COMPUT CH E, 25(11-12), 2001, pp. 1621-1632
Citation: Hy. Chang et Ra. Adomaitis, Analysis of heat transfer in a chemical vapor deposition reactor: an eigenfunction expansion solution approach, INT J HEA F, 20(1), 1999, pp. 74-83