Authors:
Ganetsos, T
Aidinis, C
Bischoff, L
Mair, GLR
Teichert, J
Panknin, D
Papadopoulos, I
Citation: T. Ganetsos et al., Liquid metal ion source-produced germanium ions for maskless ion implantation (vol 34, pg L11, 2001), J PHYS D, 34(5), 2001, pp. 839-839