Authors:
Grau, L
Augendre, E
Simoen, E
Rooyackers, R
Claeys, C
Badenes, G
Romano-Rodriguez, A
Citation: L. Grau et al., Processing factors influencing the leakage current in shallow junction diodes for deep submicro-meter CMOS, J MAT S-M E, 12(4-6), 2001, pp. 211-214
Authors:
Augendre, E
Rooyackers, R
Caymax, M
Vandamme, EP
De Keersgieter, A
Perello, C
Van Dievel, M
Pochet, S
Badenes, G
Citation: E. Augendre et al., Elevated source/drain by sacrificial selective epitaxy for high performance deep submicron CMOS: Process window versus complexity, IEEE DEVICE, 47(7), 2000, pp. 1484-1491
Authors:
Badenes, G
Rooyackers, R
Augendre, E
Vandamme, E
Perello, C
Heylen, N
Grillaert, J
Deferm, L
Citation: G. Badenes et al., A new dummy-free shallow trench isolation concept for mixed-signal applications, J ELCHEM SO, 147(10), 2000, pp. 3827-3832