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Results: 1-25/57
Authors:
ZIEBART V
PAUL O
MUNCH U
SCHWIZER J
BALTES H
Citation: V. Ziebart et al., MECHANICAL-PROPERTIES OF THIN-FILMS FROM THE LOAD DEFLECTION OF LONG CLAMPED PLATES, Journal of microelectromechanical systems, 7(3), 1998, pp. 320-328
Authors:
MAYER M
PAUL O
BALTES H
Citation: M. Mayer et al., COMPLETE SET OF PIEZORESISTIVE COEFFICIENTS OF CMOS N(-DIFFUSION()), Journal of micromechanics and microengineering, 8(2), 1998, pp. 158-160
Authors:
STEINER R
MAIER C
HABERLI A
STEINER FP
BALTES H
Citation: R. Steiner et al., OFFSET REDUCTION IN HALL DEVICES BY CONTINUOUS SPINNING CURRENT METHOD, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 167-172
Authors:
VONARX M
PAUL O
BALTES H
Citation: M. Vonarx et al., TEST STRUCTURES TO MEASURE THE HEAT-CAPACITY OF CMOS LAYER SANDWICHES, IEEE transactions on semiconductor manufacturing, 11(2), 1998, pp. 217-224
Authors:
BALTES H
LANGE D
KOLL A
Citation: H. Baltes et al., THE ELECTRONIC NOSE IN LILLIPUT, IEEE spectrum, 35(9), 1998, pp. 35-38
Authors:
BALTES H
PAUL O
BRAND O
Citation: H. Baltes et al., MICROMACHINED THERMALLY BASED CMOS MICROSENSORS, Proceedings of the IEEE, 86(8), 1998, pp. 1660-1678
Authors:
BUHLER J
FUNK J
KORVINK JG
STEINER FP
SARRO PM
BALTES H
Citation: J. Buhler et al., ELECTROSTATIC ALUMINUM MICROMIRRORS USING DOUBLE-PASS METALLIZATION, Journal of microelectromechanical systems, 6(2), 1997, pp. 126-135
Authors:
BRAND O
HORNUNG M
BALTES H
HAFNER C
Citation: O. Brand et al., ULTRASOUND BARRIER MICROSYSTEM FOR OBJECT DETECTION BASED ON MICROMACHINED TRANSDUCER ELEMENTS, Journal of microelectromechanical systems, 6(2), 1997, pp. 151-160
Authors:
FUNK JM
KORVINK JG
BUHLER J
BACHTOLD M
BALTES H
Citation: Jm. Funk et al., SOLIDIS - A TOOL FOR MICROACTUATOR SIMULATION IN 3-D, Journal of microelectromechanical systems, 6(1), 1997, pp. 70-82
Authors:
WESTBERG D
PAUL O
ANDERSSON G
BALTES H
Citation: D. Westberg et al., A CMOS-COMPATIBLE FLUID DENSITY SENSOR, Journal of micromechanics and microengineering, 7(3), 1997, pp. 253-255
Authors:
BUHLER J
STEINER FP
BALTES H
Citation: J. Buhler et al., SILICON DIOXIDE SACRIFICIAL LAYER ETCHING IN SURFACE MICROMACHINING, Journal of micromechanics and microengineering, 7(1), 1997, pp. 1-13
Authors:
VONARX M
PAUL O
BALTES H
Citation: M. Vonarx et al., TEST STRUCTURES TO MEASURE THE SEEBECK COEFFICIENT OF CMOS IC POLYSILICON, IEEE transactions on semiconductor manufacturing, 10(2), 1997, pp. 201-208
Authors:
LEE YT
LIEBERMAN MA
LICHTENBERG AJ
BOSE F
BALTES H
PATRICK R
Citation: Yt. Lee et al., GLOBAL-MODEL FOR HIGH-PRESSURE ELECTRONEGATIVE RADIOFREQUENCY DISCHARGES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 113-126
Authors:
BACHTOLD M
EMMENEGGER M
KORVINK JG
BALTES H
Citation: M. Bachtold et al., AN ERROR INDICATOR AND AUTOMATIC ADAPTIVE MESHING FOR ELECTROSTATIC BOUNDARY-ELEMENT SIMULATIONS, IEEE transactions on computer-aided design of integrated circuits and systems, 16(12), 1997, pp. 1439-1446
Authors:
BUHLER J
STEINER FP
HAUERT R
BALTES H
Citation: J. Buhler et al., LINEAR-ARRAY OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR DOUBLE-PASS METAL MICROMIRRORS, Optical engineering, 36(5), 1997, pp. 1391-1398
Authors:
BALTES H
YACOBY Y
PINDAK R
CLARKE R
PFEIFFER L
BERMAN L
Citation: H. Baltes et al., MEASUREMENT OF THE X-RAY-DIFFRACTION PHASE IN A 2D CRYSTAL, Physical review letters, 79(7), 1997, pp. 1285-1288
Authors:
BALTES H
SCHWENDLER M
HELM CA
HEGER R
GOEDEL WA
Citation: H. Baltes et al., PROPERTIES OF HYDROPHOBIC POLYMER MELTS TETHERED TO THE WATER-SURFACEAS DETERMINED WITH IN-SITU X-RAY REFLECTIVITY, Macromolecules, 30(21), 1997, pp. 6633-6639
Authors:
WESTBERG D
PAUL O
ANDERSSON GI
BALTES H
Citation: D. Westberg et al., SURFACE MICROMACHINING BY SACRIFICIAL ALUMINUM ETCHING, Journal of micromechanics and microengineering, 6(4), 1996, pp. 376-384
Authors:
SCHROTH A
SAGER K
GERLACH G
HABERLI A
BOLTSHAUSER T
BALTES H
Citation: A. Schroth et al., A RESONANT POLIYIMIDE-BASED HUMIDITY SENSOR, Sensors and actuators. B, Chemical, 34(1-3), 1996, pp. 301-304
Authors:
BALTES H
Citation: H. Baltes, FUTURE OF IC MICROTRANSDUCERS, Sensors and actuators. A, Physical, 56(1-2), 1996, pp. 179-192
Authors:
DAUDERSTADT UA
DEVRIES PHS
HIRATSUKA R
KORVINK JG
SARRO PM
BALTES H
MIDDELHOEK S
Citation: Ua. Dauderstadt et al., SIMULATION ASPECTS OF A THERMAL ACCELEROMETER, Sensors and actuators. A, Physical, 55(1), 1996, pp. 3-6
Authors:
THOMA M
SCHWENDLER M
BALTES H
HELM CA
PFOHL T
RIEGLER H
MOHWALD H
Citation: M. Thoma et al., ELLIPSOMETRY AND X-RAY REFLECTIVITY STUDIES ON MONOLAYERS OF PHOSPHATIDYLETHANOLAMINE AND PHOSPHATIDYLCHOLINE IN CONTACT WITH N-DODECANE, N-HEXADECANE, AND BICYCLOHEXYL, Langmuir, 12(7), 1996, pp. 1722-1728
Authors:
BACHTOLD M
KORVINK JG
BALTES H
Citation: M. Bachtold et al., ENHANCED MULTIPOLE ACCELERATION TECHNIQUE FOR THE SOLUTION OF LARGE POISSON COMPUTATIONS, IEEE transactions on computer-aided design of integrated circuits and systems, 15(12), 1996, pp. 1541-1546
Authors:
BALTES H
SCHWENDLER M
HELM CA
MOHWALD H
Citation: H. Baltes et al., TAIL AND HEAD GROUP-INTERACTIONS IN PHOSPHOLIPID MONOLAYERS, Journal of colloid and interface science, 178(1), 1996, pp. 135-143
Authors:
HABERLI A
SCHNEIDER M
MALCOVATI P
CASTAGNETTI R
MALOBERTI F
BALTES H
Citation: A. Haberli et al., 2-DIMENSIONAL MAGNETIC MICROSENSOR WITH ON-CHIP SIGNAL-PROCESSING FORCONTACTLESS ANGLE MEASUREMENT, IEEE journal of solid-state circuits, 31(12), 1996, pp. 1902-1907