Citation: Pw. Wang et S. Bater, DEPTH PROFILE OF CHEMICAL-SPECIES IN MULTIPLE DOPED TRIMETHYLSILANE FILM ON SI(100) SURFACES BY LOW-ENERGY AR IONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 141(1-4), 1998, pp. 181-186
Authors:
WANG PW
BATER S
ZHANG LP
ASCHERL M
CRAIG JH
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