Authors:
GOLDBERG KA
BEGUIRISTAIN R
BOKOR J
MEDECKI H
ATTWOOD DT
JACKSON K
TEJNIL E
SOMMARGREN GE
Citation: Ka. Goldberg et al., PROGRESS TOWARDS LAMBDA 20 EXTREME-ULTRAVIOLET INTERFEROMETRY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2923-2927
Authors:
KOIKE M
BEGUIRISTAIN R
UNDERWOOD JH
NAMIOKA T
Citation: M. Koike et al., A NEW OPTICAL DESIGN METHOD AND ITS APPLICATION TO AN EXTREME-ULTRAVIOLET VARIED LINE SPACING PLANE GRATING MONOCHROMATOR, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 273-277
Authors:
ATTWOOD D
SOMMARGREN G
BEGUIRISTAIN R
NGUYEN K
BOKOR J
CEGLIO N
JACKSON K
KOIKE M
UNDERWOOD J
Citation: D. Attwood et al., UNDULATOR RADIATION FOR AT-WAVELENGTH INTERFEROMETRY OF OPTICS FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Applied optics, 32(34), 1993, pp. 7022-7031