Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M

Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING, Journal of microelectromechanical systems, 7(1), 1998, pp. 79-86

Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M

Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE, Journal of microelectromechanical systems, 7(1), 1998, pp. 87-93

Authors: BURGER J BERENSCHOT E BURGER GJ VISSCHER H ELWENSPOEK M

Citation: J. Burger et al., PIEZORESISTIVE FRICTION FORCE SENSOR FOR TRIBOLOGICAL RESEARCH, Journal of micromechanics and microengineering, 8(2), 1998, pp. 138-140

Authors: LEGTENBERG R BERENSCHOT E ELWENSPOEK M FLUITMAN JH

Citation: R. Legtenberg et al., A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES, Journal of microelectromechanical systems, 6(3), 1997, pp. 234-241

Authors: TJERKSTRA RW DEBEER M BERENSCHOT E GARDENIERS JGE VANDENBERG A ELWENSPOEK MC

Citation: Rw. Tjerkstra et al., ETCHING TECHNOLOGY FOR CHROMATOGRAPHY MICROCHANNELS, Electrochimica acta, 42(20-22), 1997, pp. 3399-3406