Authors:
KUBIAK GD
TICHENOR DA
RAYCHAUDHURI AK
MALINOWSKI ME
STULEN RH
HANEY SJ
BERGER KW
NISSEN RP
WILKERSON GA
PAUL PH
BJORKHOLM JE
FETTER LA
FREEMAN RR
HIMEL MD
MACDOWELL AA
TENNANT DM
WOOD OR
WASKIEWICZ WK
WHITE DL
WINDT DL
JEWELL TE
Citation: Gd. Kubiak et al., CHARACTERIZATION OF AN EXPANDED-FIELD SCHWARZSCHILD OBJECTIVE FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3820-3825
Citation: Kw. Berger et Rw. Hines, WHAT DOES THE USER REALLY WANT - THE LIBRARY USER SURVEY PROJECT AT DUKE-UNIVERSITY, The Journal of academic librarianship, 20(5-6), 1994, pp. 306-309
Citation: Sj. Haney et al., PROTOTYPE HIGH-SPEED TAPE TARGET TRANSPORT FOR A LASER-PLASMA SOFT-X-RAY PROJECTION LITHOGRAPHY SOURCE, Applied optics, 32(34), 1993, pp. 6934-6937
Authors:
TICHENOR DA
KUBIAK GD
MALINOWSKI ME
STULEN RH
HANEY SJ
BERGER KW
BROWN LA
SWEATT WC
BJORKHOLM JE
FREEMAN RR
HIMEL MD
MACDOWELL AA
TENNANT DM
WOOD OR
BOKOR J
JEWELL TE
MANSFIELD WM
WASKIEWICZ WK
WHITE DL
WINDT DL
Citation: Da. Tichenor et al., SOFT-X-RAY PROJECTION LITHOGRAPHY EXPERIMENTS USING SCHWARZSCHILD IMAGING OPTICS, Applied optics, 32(34), 1993, pp. 7068-7071