Authors:
BONNEL M
DUHAMEL N
HAJI L
LOISEL B
STOEMENOS J
Citation: M. Bonnel et al., POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS WITH 2-STEP ANNEALING PROCESS, IEEE electron device letters, 14(12), 1993, pp. 551-553
Authors:
BONNEL M
DUHAMEL N
HENRION T
LOISEL B
HAJI T
Citation: M. Bonnel et al., FURNACE AND RAPID THERMAL ANNEALING FOR POLYSILICON THIN-FILM TRANSISTORS - INFLUENCE OF CHANNEL FILM THICKNESS, Journal of the Electrochemical Society, 140(12), 1993, pp. 3584-3587