Authors: BARNA GG LOEWENSTEIN LM BRANKNER KJ BUTLER SW MOZUMDER PK STEFANI JA HENCK SA CHAPADOS P BUCK D MAUNG S SAXENA S UNRUH A

Citation: Gg. Barna et al., SENSOR INTEGRATION INTO PLASMA ETCH REACTORS OF A DEVELOPMENTAL PILOTLINE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2860-2867

Authors: BARNA GG LOEWENSTEIN LM HENCK SA CHAPADOS P BRANKNER KJ GALE RJ MOZUMDER PK BUTLER SW STEFANI JA

Citation: Gg. Barna et al., DRY ETCH PROCESSES AND SENSORS, Solid state technology, 37(1), 1994, pp. 47