Authors:
SHORE BW
PERRY MD
BRITTEN JA
BOYD RD
FEIT MD
NGUYEN HT
CHOW R
LOOMIS GE
LI LF
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Authors:
FERNANDEZ A
NGUYEN HT
BRITTEN JA
BOYD RD
PERRY MD
KANIA DR
HAWRYLUK AM
Citation: A. Fernandez et al., USE OF INTERFERENCE LITHOGRAPHY TO PATTERN ARRAYS OF SUBMICRON RESISTSTRUCTURES FOR FIELD-EMISSION FLAT-PANEL DISPLAYS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(3), 1997, pp. 729-735
Authors:
SPALLAS JP
BOYD RD
BRITTEN JA
FERNANDEZ A
HAWRYLUK AM
PERRY MD
KANIA DR
Citation: Jp. Spallas et al., FABRICATION OF SUB-0.5 MU-M DIAMETER COBALT DOTS ON SILICON SUBSTRATES AND PHOTORESIST PEDESTALS ON 50 CM X 50 CM GLASS SUBSTRATES USING LASER INTERFERENCE LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 2005-2007
Authors:
BRITTEN JA
NGUYEN HT
FALABELLA SF
SHORE BW
PERRY MD
RAGUIN DH
Citation: Ja. Britten et al., ETCH-STOP CHARACTERISTICS OF SC2O3 AND HFO2 FILMS FOR MULTILAYER DIELECTRIC GRATING APPLICATIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2973-2975
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Citation: Ja. Britten et al., IN-SITU END-POINT DETECTION DURING DEVELOPMENT OF SUBMICROMETER GRATING STRUCTURES IN PHOTORESIST, Optical engineering, 34(2), 1995, pp. 474-479
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