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Results: 1-6 |
Results: 6

Authors: Babin, S Gaevski, ME Konnikov, SG
Citation: S. Babin et al., Measurement and simulation of temperature dynamics under electron beam, J VAC SCI B, 19(1), 2001, pp. 153-157

Authors: Babin, S Kuzmin, IY Mack, CA
Citation: S. Babin et al., Comprehensive simulation of electron-beam lithography processes using PROLITH/3D and TEMPTATION software tools, MICROEL ENG, 57-8, 2001, pp. 343-348

Authors: Clavert, P Bonnomet, F Gicquel, P Lefebvre, Y Babin, S Kempf, JF
Citation: P. Clavert et al., Bilateral subtotal scapulectomy for chondrosarcoma in Ollier's disease: successive procedures within a 16-year interval, REV CHIR OR, 87(3), 2001, pp. 281-285

Authors: Babin, S
Citation: S. Babin, Resist heating with different writing strategies for high-throughput maskmaking, MICROEL ENG, 53(1-4), 2000, pp. 341-344

Authors: Babin, S Hartmann, H Kuzmin, IY
Citation: S. Babin et al., Simulation and measurement of resist heating in multipass exposure using a50 kV variably shaped beam system, MICROEL ENG, 46(1-4), 1999, pp. 231-234

Authors: Babin, S Kuzmin, IY
Citation: S. Babin et Iy. Kuzmin, Experimental verification of the TEMPTATION (temperature simulation) software tool, J VAC SCI B, 16(6), 1998, pp. 3241-3247
Risultati: 1-6 |