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Citation: Vk. Smirnov et al., Influence of topographical irregularities on the process of formation of wave micro relief on silicon surfaces, IAN FIZ, 64(4), 2000, pp. 626-630

Authors: Bachurin, VI Lepshin, PA Smirnov, VK

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Authors: Bachurin, VI Churilov, AB Potapov, EV Smirnov, VK Makarov, VV Danilin, AB

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