Authors:
Theobald, M
Baclet, P
Legaie, O
Durand, J
Citation: M. Theobald et al., Doped CHx microshells prepared by radio frequency plasma enhanced chemicalvapor deposition for inertial confinement fusion experiments, J VAC SCI A, 19(1), 2001, pp. 118-123
Authors:
Theobald, M
Durand, J
Baclet, P
Legaie, O
Citation: M. Theobald et al., Comparative study of a-C : H films for inertial confinement fusion prepared with various hydrocarbon precursors by radio frequency-plasma enhanced chemical vapor deposition, J VAC SCI A, 18(1), 2000, pp. 278-284