Citation: Kh. Bai et al., Effects of substrate bias voltage on plasma parameters in temperature control using a grid system, PHYS PLASMA, 8(9), 2001, pp. 4246-4250
Authors:
Bai, KH
Hong, JI
Chung, CW
Kim, SS
Chang, HY
Citation: Kh. Bai et al., Pressure and helium mixing effects on plasma parameters in temperature control using a grid system, PHYS PLASMA, 8(7), 2001, pp. 3498-3501