Authors:
Lauwers, A
Besser, P
Gutt, T
Satta, A
de Potter, M
Lindsay, R
Roelandts, N
Loosen, F
Jin, S
Bender, H
Stucchi, M
Vrancken, C
Deweerdt, B
Maex, K
Citation: A. Lauwers et al., Comparative study of Ni-silicide and Co-silicide for sub 0.25-mu m technologies, MICROEL ENG, 50(1-4), 2000, pp. 103-116