Authors:
Braic, M
Zoita, CN
Braic, V
Kiss, A
Popescu, M
Musa, G
Citation: M. Braic et al., Influence of He, Ne and Kr addition in reactive Ar/N-2 dc magnetron plasmaon TiN deposition, VACUUM, 53(1-2), 1999, pp. 41-45
Authors:
Lungu, CP
Futsuhara, M
Takai, O
Braic, M
Musa, G
Citation: Cp. Lungu et al., Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films, VACUUM, 51(4), 1998, pp. 635-640