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Authors:
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Akiyama, T
Staufer, U
de Rooij, NF
Lange, D
Hagleitner, C
Brand, O
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Tonin, A
Hidber, HR
Citation: T. Akiyama et al., Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics, J VAC SCI B, 18(6), 2000, pp. 2669-2675
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Authors:
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Kissinger, G
Benkitsch, AC
Brand, O
Baltes, H
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