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Results: 14
Authors:
Zimmermann, B
Lucklum, R
Hauptmann, P
Rabe, J
Buttgenbach, S
Citation: B. Zimmermann et al., Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis, SENS ACTU-B, 76(1-3), 2001, pp. 47-57
Authors:
Herrmann, F
Weihnacht, M
Buttgenbach, S
Citation: F. Herrmann et al., Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures, IEEE ULTRAS, 48(1), 2001, pp. 268-273
Authors:
Rudnitskaya, A
Ehlert, A
Legin, A
Vlasov, Y
Buttgenbach, S
Citation: A. Rudnitskaya et al., Multisensor system on the basis of an array of non-specific chemical sensors and artificial neural networks for determination of inorganic pollutantsin a model groundwater, TALANTA, 55(2), 2001, pp. 425-431
Authors:
Butefisch, S
Schoft, A
Buttgenbach, S
Citation: S. Butefisch et al., Three-axes monolithic silicon low-g accelerometer, J MICROEL S, 9(4), 2000, pp. 551-556
Authors:
Ohnmacht, M
Seidemann, V
Buttgenbach, S
Citation: M. Ohnmacht et al., Microcoils and microrelays - an optimized multilayer fabrication process, SENS ACTU-A, 83(1-3), 2000, pp. 124-129
Authors:
Steffensen, L
Than, O
Buttgenbach, S
Citation: L. Steffensen et al., BICEPS: a modular environment for the design of micromachined silicon devices, SENS ACTU-A, 79(1), 2000, pp. 76-81
Authors:
Herrmann, F
Hahn, D
Buttgenbach, S
Citation: F. Herrmann et al., Separate determination of liquid density and viscosity with sagittally corrugated Love-mode sensors, SENS ACTU-A, 78(2-3), 1999, pp. 99-107
Authors:
Dauer, S
Ehlert, A
Buttgenbach, S
Citation: S. Dauer et al., Rapid prototyping of micromechanical devices using a Q-switched Nd : YAG laser with optional frequency doubling, SENS ACTU-A, 76(1-3), 1999, pp. 381-385
Authors:
Buttgenbach, S
Citation: S. Buttgenbach, Microsensors and microsystems: Innovative applications and innovative technology, TEC MES, 66(5), 1999, pp. 175-175
Authors:
Butefisch, S
Buttgenbach, S
Citation: S. Butefisch et S. Buttgenbach, Silicon three-axial tactile force sensor, TEC MES, 66(5), 1999, pp. 185-190
Authors:
Kleine-Besten, T
Loheide, S
Brand, U
Schlachetzki, A
Butefisch, S
Buttgenbach, S
Citation: T. Kleine-besten et al., 3D probe for dimensional metrology on microsystem components, TEC MES, 66(12), 1999, pp. 490-495
Authors:
Herrmann, F
Weihnacht, M
Buttgenbach, S
Citation: F. Herrmann et al., Properties of shear-horizontal surface acoustic waves in different layeredquartz-SiO2 structures, ULTRASONICS, 37(5), 1999, pp. 335-341
Authors:
Herrmann, F
Hahn, D
Buttgenbach, S
Citation: F. Herrmann et al., Separation of density and viscosity influence on liquid-loaded surface acoustic wave devices, APPL PHYS L, 74(22), 1999, pp. 3410-3412
Authors:
Herrmann, F
Buttgenbach, S
Citation: F. Herrmann et S. Buttgenbach, Temperature-compensated shear-horizontal surface acoustic waves in layeredquartz/SiO2-Structures, PHYS ST S-A, 170(2), 1998, pp. R3-R4
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