Authors:
MIZUNO J
NOTTMEYER K
CABUZ C
MINAMI K
KOBAYASHI T
ESASHI M
Citation: J. Mizuno et al., FABRICATION AND CHARACTERIZATION OF A SILICON CAPACITIVE STRUCTURE FOR SIMULTANEOUS DETECTION OF ACCELERATION AND ANGULAR RATE, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 646-650
Authors:
CABUZ C
FUKATSU K
KURABAYASHI T
MINAMI K
ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995), Journal of microelectromechanical systems, 4(4), 1995, pp. 242-242
Authors:
CABUZ C
FUKATSU K
KURABAYASHI T
MINAMI K
ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON, Journal of microelectromechanical systems, 4(3), 1995, pp. 109-118
Citation: M. Hashimoto et al., SILICON RESONANT ANGULAR RATE SENSOR USING ELECTROMAGNETIC-EXCITATIONAND CAPACITIVE DETECTION, Journal of micromechanics and microengineering, 5(3), 1995, pp. 219-225
Authors:
CABUZ C
SHOJI S
FUKATSU K
CABUZ E
MINAMI K
ESASHI M
Citation: C. Cabuz et al., FABRICATION AND PACKAGING OF A RESONANT INFRARED-SENSOR INTEGRATED INSILICON, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 92-99