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Results: 1-6 |
Results: 6

Authors: CABUZ C
Citation: C. Cabuz, TRADEOFFS IN MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM MATERIALS, Optical engineering, 36(5), 1997, pp. 1298-1306

Authors: MIZUNO J NOTTMEYER K CABUZ C MINAMI K KOBAYASHI T ESASHI M
Citation: J. Mizuno et al., FABRICATION AND CHARACTERIZATION OF A SILICON CAPACITIVE STRUCTURE FOR SIMULTANEOUS DETECTION OF ACCELERATION AND ANGULAR RATE, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 646-650

Authors: CABUZ C FUKATSU K KURABAYASHI T MINAMI K ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995), Journal of microelectromechanical systems, 4(4), 1995, pp. 242-242

Authors: CABUZ C FUKATSU K KURABAYASHI T MINAMI K ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON, Journal of microelectromechanical systems, 4(3), 1995, pp. 109-118

Authors: HASHIMOTO M CABUZ C MINAMI K ESASHI M
Citation: M. Hashimoto et al., SILICON RESONANT ANGULAR RATE SENSOR USING ELECTROMAGNETIC-EXCITATIONAND CAPACITIVE DETECTION, Journal of micromechanics and microengineering, 5(3), 1995, pp. 219-225

Authors: CABUZ C SHOJI S FUKATSU K CABUZ E MINAMI K ESASHI M
Citation: C. Cabuz et al., FABRICATION AND PACKAGING OF A RESONANT INFRARED-SENSOR INTEGRATED INSILICON, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 92-99
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