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Results: 1-8 |
Results: 8
ORIENTATION-DEPENDENCE OF ELASTIC STRAIN-ENERGY IN HEXAGONAL AND CUBIC BORON-NITRIDE LAYERS IN ENERGETICALLY DEPOSITED BN FILMS
Authors: CARDINALE GF MEDLIN DL MIRKARIMI PB MCCARTY KF HOWITT DG
Citation: Gf. Cardinale et al., ORIENTATION-DEPENDENCE OF ELASTIC STRAIN-ENERGY IN HEXAGONAL AND CUBIC BORON-NITRIDE LAYERS IN ENERGETICALLY DEPOSITED BN FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 196-200
FABRICATION OF METAL-OXIDE-SEMICONDUCTOR DEVICES WITH EXTREME-ULTRAVIOLET LITHOGRAPHY
Authors: NGUYEN KB CARDINALE GF TICHENOR DA KUBIAK GD BERGER K RAYCHAUDHURI AK PERRAS Y HANEY SJ NISSEN R KRENZ K STULEN RH FUJIOKA H HU C BOKOR J TENNANT DM FETTER LA
Citation: Kb. Nguyen et al., FABRICATION OF METAL-OXIDE-SEMICONDUCTOR DEVICES WITH EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4188-4192
ANALYSIS OF RESIDUAL-STRESS IN CUBIC BORON-NITRIDE THIN-FILMS USING MICROMACHINED CANTILEVER BEAMS
Authors: CARDINALE GF HOWITT DG MCCARTY KF MEDLIN DL MIRKARIMI PB MOODY NR
Citation: Gf. Cardinale et al., ANALYSIS OF RESIDUAL-STRESS IN CUBIC BORON-NITRIDE THIN-FILMS USING MICROMACHINED CANTILEVER BEAMS, DIAMOND AND RELATED MATERIALS, 5(11), 1996, pp. 1295-1302
SUBSTRATE EFFECTS IN CUBIC BORON-NITRIDE FILM FORMATION
Authors: MIRKARIMI PB MCCARTY KF CARDINALE GF MEDLIN DL OTTESEN DK JOHNSEN HA
Citation: Pb. Mirkarimi et al., SUBSTRATE EFFECTS IN CUBIC BORON-NITRIDE FILM FORMATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(1), 1996, pp. 251-255
MICROMACHINED SILICON CANTILEVER BEAMS FOR THIN-FILM STRESS MEASUREMENT
Authors: CARDINALE GF HOWITT DG CLIFT WM MCCARTY KF MEDLIN DL MIRKARIMI PB MOODY NR
Citation: Gf. Cardinale et al., MICROMACHINED SILICON CANTILEVER BEAMS FOR THIN-FILM STRESS MEASUREMENT, Thin solid films, 287(1-2), 1996, pp. 214-219
CRYSTALLOGRAPHIC TEXTURE IN CUBIC BORON-NITRIDE THIN-FILMS
Authors: MEDLIN DL FRIEDMANN TA MIRKARIMI PB CARDINALE GF MCCARTY KF
Citation: Dl. Medlin et al., CRYSTALLOGRAPHIC TEXTURE IN CUBIC BORON-NITRIDE THIN-FILMS, Journal of applied physics, 79(7), 1996, pp. 3567-3571
ON THE ROLE OF IONS IN THE FORMATION OF CUBIC BORON-NITRIDE FILMS BY ION-ASSISTED DEPOSITION
Authors: MIRKARIMI PB MCCARTY KF MEDLIN DL WOLFER WG FRIEDMANN TA KLAUS EJ CARDINALE GF HOWITT DG
Citation: Pb. Mirkarimi et al., ON THE ROLE OF IONS IN THE FORMATION OF CUBIC BORON-NITRIDE FILMS BY ION-ASSISTED DEPOSITION, Journal of materials research, 9(11), 1994, pp. 2925-2938
EFFECTS OF AMBIENT CONDITIONS ON THE ADHESION OF CUBIC BORON-NITRIDE FILMS ON SILICON SUBSTRATES
Authors: CARDINALE GF MIRKARIMI PB MCCARTY KF KLAUS EJ MEDLIN DL CLIFT WM HOWITT DG
Citation: Gf. Cardinale et al., EFFECTS OF AMBIENT CONDITIONS ON THE ADHESION OF CUBIC BORON-NITRIDE FILMS ON SILICON SUBSTRATES, Thin solid films, 253(1-2), 1994, pp. 130-135
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