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Authors:
VELASQUEZ ELZ
FANTINI MCA
CARRENO MNP
PEREYRA I
TAKAHASHI H
LANDERS R
Citation: Elz. Velasquez et al., EFFECT OF PLASMA-ETCHING, CARBON CONCENTRATION, AND BUFFER LAYER ON THE PROPERTIES OF A-SI-H A-SI1-XCX-H MULTILAYERS/, Journal of applied physics, 75(1), 1994, pp. 543-548