Authors:
CASADY JB
MANI SS
SIERGIEJ RR
URBAN W
BALAKRISHNA V
SANGER PA
BRANDT CD
Citation: Jb. Casady et al., SURFACE-ROUGHNESS OF REACTIVE ION ETCHED 4H-SIC IN SF6 O-2 AND CHF3/H-2/O-2 PLASMAS/, Journal of the Electrochemical Society, 145(4), 1998, pp. 58-60
Citation: Jb. Casady et al., A HYBRID GH-SIC TEMPERATURE SENSOR OPERATIONAL FROM 25-DEGREES-C TO 500-DEGREES-C, IEEE transactions on components, packaging, and manufacturing technology. Part A, 19(3), 1996, pp. 416-422
Citation: Jb. Casady et Rw. Johnson, STATUS OF SILICON-CARBIDE (SIC) AS A WIDE-BANDGAP SEMICONDUCTOR FOR HIGH-TEMPERATURE APPLICATIONS - A REVIEW, Solid-state electronics, 39(10), 1996, pp. 1409-1422
Authors:
CASADY JB
LUCKOWSKI ED
BOZACK M
SHERIDAN D
JOHNSON RW
WILLIAMS JR
Citation: Jb. Casady et al., ETCHING OF 6H-SIC AND 4H-SIC USING NF3 IN A REACTIVE ION ETCHING SYSTEM, Journal of the Electrochemical Society, 143(5), 1996, pp. 1750-1753