Authors: TOMINAGA K KUSAKA K CHONG MF HANABUSA T SHINTANI Y

Citation: K. Tominaga et al., FILM DEGRADATION IN ALN PREPARATION BY FACING TARGET SYSTEM, JPN J A P 1, 33(9B), 1994, pp. 5235-5239

Authors: TOMINAGA K KATAOKA M UEDA T CHONG MF SHINTANI Y MORI I

Citation: K. Tominaga et al., PREPARATION OF CONDUCTIVE ZNO-AL FILMS BY A FACING TARGET SYSTEM WITHA STRONG MAGNETIC-FIELD, Thin solid films, 253(1-2), 1994, pp. 9-13

Authors: TOMINAGA K SUEYOSHI Y IMAI H CHONG MF SHINTANI Y

Citation: K. Tominaga et al., SIMULTANEOUS MEASUREMENTS OF ENERGETIC O- IONS AND O-ATOMS IN SPUTTERING OF ZINC-OXIDE TARGET, JPN J A P 1, 32(10), 1993, pp. 4745-4749