Authors: CHUI BW STOWE TD JU YS GOODSON KE KENNY TW MAMIN HJ TERRIS BD RIED RP RUGAR D

Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS WITH INTEGRATED HEATERS AND PIEZORESISTIVE SENSORS FOR HIGH-DENSITY AFM THERMOMECHANICAL DATA-STORAGE, Journal of microelectromechanical systems, 7(1), 1998, pp. 69-78

Authors: CHUI BW KENNY TW MAMIN HJ TERRIS BD RUGAR D

Citation: Bw. Chui et al., INDEPENDENT DETECTION OF VERTICAL AND LATERAL FORCES WITH A SIDEWALL-IMPLANTED DUAL-AXIS PIEZORESISTIVE CANTILEVER, Applied physics letters, 72(11), 1998, pp. 1388-1390

Authors: CHUI BW STOWE TD KENNY TW MAMIN HJ TERRIS BD RUGAR D

Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS FOR THERMAL WRITING AND PIEZORESISTIVE READBACK WITH THE ATOMIC-FORCE MICROSCOPE, Applied physics letters, 69(18), 1996, pp. 2767-2769