Authors:
VOULOT D
MCCULLOUGH RW
THOMPSON WR
BURNS D
GEDDES J
COSIMINI GJ
NELSON E
CHOW PP
KLAASSEN J
Citation: D. Voulot et al., DETERMINATION OF THE ATOMIC NITROGEN FLUX FROM A RADIO-FREQUENCY PLASMA NITRIDE SOURCE FOR MOLECULAR-BEAM EPITAXY SYSTEMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3434-3437