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DETERMINATION OF THE ATOMIC NITROGEN FLUX FROM A RADIO-FREQUENCY PLASMA NITRIDE SOURCE FOR MOLECULAR-BEAM EPITAXY SYSTEMS
Authors: VOULOT D MCCULLOUGH RW THOMPSON WR BURNS D GEDDES J COSIMINI GJ NELSON E CHOW PP KLAASSEN J
Citation: D. Voulot et al., DETERMINATION OF THE ATOMIC NITROGEN FLUX FROM A RADIO-FREQUENCY PLASMA NITRIDE SOURCE FOR MOLECULAR-BEAM EPITAXY SYSTEMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3434-3437
GAN GROWTH BY A CONTROLLABLE RF-EXCITED NITROGEN-SOURCE
Authors: VANHOVE JM COSIMINI GJ NELSON E WOWCHAK AM CHOW PP
Citation: Jm. Vanhove et al., GAN GROWTH BY A CONTROLLABLE RF-EXCITED NITROGEN-SOURCE, Journal of crystal growth, 150(1-4), 1995, pp. 908-911
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