Authors:
Puchner, H
Liu, YC
Kong, W
Duan, F
Castagnetti, R
Citation: H. Puchner et al., Substrate engineering to improve soft-error-rate immunity for SRAM technologies, MICROEL REL, 41(9-10), 2001, pp. 1319-1324
Citation: H. Puchner et al., Minimizing thick resist sidewall slope dependence on design geometry by optimizing bake conditions, MICROEL ENG, 53(1-4), 2000, pp. 429-432