Authors:
Chor, EF
Zhang, D
Gong, H
Chen, GL
Liew, TYF
Citation: Ef. Chor et al., Electrical characterization and metallurgical analysis of Pd-containing multilayer contacts on GaN, J APPL PHYS, 90(3), 2001, pp. 1242-1249
Authors:
Chong, PF
Cho, BJ
Chor, EF
Joo, MS
Yeo, IS
Citation: Pf. Chong et al., Investigation of reliability degradation of ultra-thin gate oxides irradiated under electron-beam lithography conditions, JPN J A P 1, 39(4B), 2000, pp. 2181-2185
Citation: Cl. Cha et al., Photoresist patterning and ion implantation degradation effects on flash memory device yield, EL SOLID ST, 3(7), 2000, pp. 340-342
Authors:
Cha, CL
Chor, EF
Gong, H
Zhang, AQ
Chan, L
Citation: Cl. Cha et al., Plasma etching optimization of oxide/nitride/oxide interpoly dielectric breakdown time in flash memory devices, IEEE SEMIC, 13(3), 2000, pp. 386-389
Citation: Cl. Cha et al., Effects of surface smoothness and deposition temperature of floating gatesin flash memory devices to oxide/nitride/oxide interpoly dielectric breakdown, J MAT SCI L, 19(9), 2000, pp. 817-821
Authors:
Kim, SJ
Cho, BJ
Chong, PF
Chor, EF
Ang, CH
Ling, CH
Joo, MS
Yeo, IS
Citation: Sj. Kim et al., Does short wavelength lithography process degrade the integrity of thin gate oxide?, MICROEL REL, 40(8-10), 2000, pp. 1609-1613
Authors:
Cha, CL
Chor, EF
Jia, YM
Bourdillon, AJ
Gong, H
Pan, JS
Zhang, AQ
Tang, SK
Boothroyd, CB
Citation: Cl. Cha et al., Evaluation of silicon nitride and silicon carbide as efficient polysilicongrain-growth inhibitors, J MAT SCI L, 18(17), 1999, pp. 1427-1431
Authors:
Cha, CL
Chor, EF
Gong, H
Bourdillon, AJ
Jia, YM
Pan, JS
Zhang, AQ
Chan, L
Citation: Cl. Cha et al., Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation, APPL PHYS L, 75(3), 1999, pp. 355-357
Authors:
Cha, CL
Tee, KC
Chor, EF
Gong, H
Prasad, K
Bourdillon, AJ
See, A
Chan, L
Lee, MMO
Citation: Cl. Cha et al., Enhancement of hot-carrier injection resistance for deep submicron transistor gate dielectric with a powered solenoid, APPL PHYS L, 75(26), 1999, pp. 4192-4194