Citation: V. Foglietti et al., Progress toward the fabrication of scanning near field optical probe: pattern definition by e-beam lithography, MICROEL ENG, 57-8, 2001, pp. 807-811
Authors:
Giovine, E
Cianci, E
Foglietti, V
Notargiacomo, A
Evangelisti, F
Citation: E. Giovine et al., Nanofabrication of quantum wires on (100) Si and SiGe by shifted-resist pattern and anisotropic wet etching, MICROEL ENG, 53(1-4), 2000, pp. 217-219
Authors:
Caliano, G
Foglietti, V
Cianci, E
Pappalardo, M
Citation: G. Caliano et al., A silicon microfabricated electrostatic transducer: 1 MHz transmission in air and in water, MICROEL ENG, 53(1-4), 2000, pp. 573-576