Authors: Corman, T Kalvesten, E Huiku, M Weckstrom, K Merilainen, PT Stemme, G

Citation: T. Corman et al., An optical IR-source and CO2-chamber system for CO2 measurements, J MICROEL S, 9(4), 2000, pp. 509-516

Authors: Melin, J Enoksson, P Corman, T Stemme, G

Citation: J. Melin et al., A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using 'burst' technology, J MICROM M, 10(2), 2000, pp. 209-217

Authors: Corman, T Enoksson, P Noren, K Stemme, G

Citation: T. Corman et al., A low-pressure encapsulated resonant fluid density sensor with feedback control electronics, MEAS SCI T, 11(3), 2000, pp. 205-211

Authors: Corman, T Noren, K Enoksson, P Melin, J Stemme, G

Citation: T. Corman et al., "Burst" technology with feedback-loop control for capacitive detection andelectrostatic excitation of resonant silicon sensors, IEEE DEVICE, 47(11), 2000, pp. 2228-2235

Authors: Veijola, T Corman, T Enoksson, P Stemme, G

Citation: T. Veijola et al., Dynamic simulation model for a vibrating fluid density sensor, SENS ACTU-A, 76(1-3), 1999, pp. 213-224

Authors: Corman, T

Citation: T. Corman, Verify your system-level designs with a virtual prototype, ELECTR DES, 47(21), 1999, pp. 72