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Results: 5
Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films
Authors:
Modreanu, M Gartner, M Tomozeiu, N Seekamp, J Cosmin, P
Citation:
M. Modreanu et al., Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films, OPT MATER, 17(1-2), 2001, pp. 145-148
Optical and electrical properties of LPCVD silicon oxynitride films on silicon
Authors:
Szekeres, A Alexandrova, S Modreanu, M Cosmin, P Gartner, M
Citation:
A. Szekeres et al., Optical and electrical properties of LPCVD silicon oxynitride films on silicon, VACUUM, 61(2-4), 2001, pp. 205-209
Microstructural and optical properties of as-deposited LPCVD silicon films
Authors:
Modreanu, M Tomozeiu, N Gartner, M Cosmin, P
Citation:
M. Modreanu et al., Microstructural and optical properties of as-deposited LPCVD silicon films, THIN SOL FI, 383(1-2), 2001, pp. 254-257
Phase and surface roughness evolution for as-deposited LPCVD silicon films
Authors:
Cobianu, C Plugaru, R Nastase, N Nastase, S Flueraru, C Modreanu, M Adamczevska, J Paszkowicz, W Auleytner, J Cosmin, P
Citation:
C. Cobianu et al., Phase and surface roughness evolution for as-deposited LPCVD silicon films, J PHYS IV, 9(P8), 1999, pp. 1083-1090
Optical properties of LPCVD silicon oxynitride
Authors:
Modreanu, M Tomozeiu, N Cosmin, P Gartner, M
Citation:
M. Modreanu et al., Optical properties of LPCVD silicon oxynitride, THIN SOL FI, 337(1-2), 1999, pp. 82-84
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