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Results: 1-9 |
Results: 9
ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING
Authors: SURENDRA M GUARNIERI CR SELWYN GS DALVIE M
Citation: M. Surendra et al., ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING, Applied physics letters, 66(18), 1995, pp. 2415-2417
MICROPROFILE SIMULATIONS FOR PLASMA-ETCHING WITH SURFACE PASSIVATION
Authors: HAMAGUCHI S DALVIE M
Citation: S. Hamaguchi et M. Dalvie, MICROPROFILE SIMULATIONS FOR PLASMA-ETCHING WITH SURFACE PASSIVATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2745-2753
SIMULATION OF SURFACE-TOPOGRAPHY EVOLUTION DURING PLASMA-ETCHING BY THE METHOD OF CHARACTERISTICS
Authors: ARNOLD JC SAWIN HH DALVIE M HAMAGUCHI S
Citation: Jc. Arnold et al., SIMULATION OF SURFACE-TOPOGRAPHY EVOLUTION DURING PLASMA-ETCHING BY THE METHOD OF CHARACTERISTICS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 620-635
THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES
Authors: HARGIS PJ GREENBERG KE MILLER PA GERARDO JB TORCZYNSKI JR RILEY ME HEBNER GA ROBERTS JR OLTHOFF JK WHETSTONE JR VANBRUNT RJ SOBOLEWSKI MA ANDERSON HM SPLICHAL MP MOCK JL BLETZINGER P GARSCADDEN A GOTTSCHO RA SELWYN G DALVIE M HEIDENREICH JE BUTTERBAUGH JW BRAKE ML PASSOW ML PENDER J LUJAN A ELTA ME GRAVES DB SAWIN HH KUSHNER MJ VERDEYEN JT HORWATH R TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154
INTRINSIC AND PASSIVATION-INDUCED TRENCH TAPERING DURING PLASMA-ETCHING
Authors: HAMAGUCHI S DALVIE M
Citation: S. Hamaguchi et M. Dalvie, INTRINSIC AND PASSIVATION-INDUCED TRENCH TAPERING DURING PLASMA-ETCHING, Journal of the Electrochemical Society, 141(7), 1994, pp. 1964-1972
MOMENT ANALYSIS OF RF PARALLEL-PLATE-DISCHARGE SIMULATIONS USING THE PARTICLE-IN-CELL WITH MONTE-CARLO COLLISIONS TECHNIQUE
Authors: SURENDRA M DALVIE M
Citation: M. Surendra et M. Dalvie, MOMENT ANALYSIS OF RF PARALLEL-PLATE-DISCHARGE SIMULATIONS USING THE PARTICLE-IN-CELL WITH MONTE-CARLO COLLISIONS TECHNIQUE, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 48(5), 1993, pp. 3914-3924
A SHOCK-TRACKING ALGORITHM FOR SURFACE EVOLUTION UNDER REACTIVE-ION ETCHING
Authors: HAMAGUCHI S DALVIE M FAROUKI RT SETHURAMAN S
Citation: S. Hamaguchi et al., A SHOCK-TRACKING ALGORITHM FOR SURFACE EVOLUTION UNDER REACTIVE-ION ETCHING, Journal of applied physics, 74(8), 1993, pp. 5172-5184
DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES
Authors: DALVIE M SELWYN GS SURENDRA M GUARNIERI CR MCGILL JJ
Citation: M. Dalvie et al., DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES, Applied physics letters, 63(24), 1993, pp. 3279-3281
SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS
Authors: DALVIE M SURENDRA M SELWYN GS
Citation: M. Dalvie et al., SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS, Applied physics letters, 62(24), 1993, pp. 3207-3209
Risultati: 1-9 |